Part 1. Regular errors
| D, Lx, Ly, C |
Parameters of reference surface
D – sag of the sphere at the edge of pupil (D=0 for plane reference surface)
Lx, Ly – tilt of sphere
C – constant |
| RMS(w) |
RMS of wavefront with regard to reference surface |
| A, FIA |
value and angle of turn of astigmatism |
| RMS(w-a) |
RMS of wavefront beyond astigmatism |
| FA |
statistic estimation of the contribution of astigmatism to the complete wavefront distortion |
| B0,B2,B4,... |
coefficients of zonal error at corresponding power P
( p*p = x*x + y*y ) or at Zernike polynomial |
| RZ |
span of zonal error |
| RMS(w-z) |
RMS of wavefront except zonal error |
| FZ |
statistic estimation of the contribution of zonal error to the complete wavefront distortion |
| C, FIC |
value and angle of turn of coma error |
| RMS(w-c) |
RMS of wavefront except coma |
| FC |
statistic estimation of the contribution of coma error to the complete wavefront distortion |
|
Part 2. Local errors (errors of wavefront with power higher than 4th)
| R |
span of local errors |
| RMS(M) |
RMS of local errors |
|
Part 3. Parameters of surface under control
| RMS |
RMS of surface error (RMS = RMS(w) ) |
| MIN |
minimal value of surface (valley) |
| MAX |
maximal value of surface (peak) |
| R |
span (PtV) |
| STRL |
lower bound of Schtrel number |
| STRM |
upper bound of Schtrel number |
| X, Y |
test area coordinates |
|
